Introduction.
From Smart Sensors to Smart Networks: How MEMS sensors enable the Internet of Things.
Outline.
Role of sensors in loT.
Sensors you use.
Timing Circuit.
MEMS Gyroscope Chip.
Atomic Force Microscopy - Sensing on the nanoscale.
Laser Scanner.
Texas Instruments Digital Light Processing (DLP) Technology.
Grating Light Valve - Silicon Light Machines.
How does sensors work?.
Capacitive measurement of displacement.
Small is beautiful.
Silicon Micromechanical Devices.
MEMS Materials.
Si Diamond structure.
Anisotropic Etching of Silicon.
Bulk Micromachined Sensors.
Micromachining Ink Jet Nozzles.
Electrostatic Combdrive Actuator.
Deep Reactive lon Etching (DRIE) Deposit polymer.
2x2 switch - DRIE of SOI.
Fiber AFM Fabrication.
Hydrogen Annealing.
Before Hydrogen Anneal.
After Hydrogen Anneal.
Simplified fabrication.
Conundrum - Smart Sensors MEMS and Electronics Integration.
Autonomous vehicles.
Awareness - Random Access Scanning.
Possible solution - MEMS Phased Arrays.
Wearable, Ingestible and Implantable Sensors.
What are the opportunities? What are the cool applications? • Awareness = Efficiency, safety, sustainability!.